1 results listed
In this paper, TiAlZrN coatings were deposited on
AISI H13 steels with various bias voltage and working pressure
ranging between -50 V to -90 V and 2 x10-3 to 3x10-3 Torr
respectively. Closed field unbalanced magnetron sputtering
technique which is a kind of PVD was used for the deposition
process. Among the different PVD methods, closed field
unbalanced magnetron sputtering method is one of the most
successful and sophisticated technology for the metal, alloy and
ceramic coatings to control microstructure, surface morphology
and phase composition. After the deposition process, the effects
of bias voltage and working pressure on the microstructure,
hardness, scracth and wear properties were investigated by
SEM, EDS, nanoindentation, scratch and wear volume
measurements. All produced films exhibited classic surface of
granular structure and the cross-sectional morphology showed
that all films have columnar structure which was altered from
massive columnar to denser columnar structure due to increase
the bias voltage and working pressure. TiAlZrN films deposited
at -90 V and 3x10-3 Torr exhibited dentest structure, besides
possessed the best nano hardness, scratch and wear properties.
The highest nano hardness of 42 GPa is obtained under highest
bias and working pressure. Also compared untreated AISI H13
steel which is the substrate, the produced TiAlZrN with
aforementioned coating parameters considerably enhance the
wear resistance.
International Iron & Steel Symposium
UDCS
Yaşar Sert
Levent KARA
Tevfik Küçükömeroğlu